SGM 1200℃上開門真空井式坩堝爐是由洛陽西格馬高溫電爐小型實驗坩堝爐。
西格馬小型真空坩堝爐集控制系統與爐膛一體,其中爐膛保溫材料采用陶瓷纖維真空吸附成型,加熱元件采用質硅鉬棒。超大口徑的石英爐腔和真空密封法蘭系統,可在流動氣氛和真空狀態下快速加熱樣品。主要用于煅燒真空或惰性氣體中的高純度化合物,退火或擴散半導體晶片;也可用于烘燒或燒結陶瓷材料。
Sigma small vacuum crucible furnace integrates control system and furnace. Ceramic fiber vacuum absorption molding is used as furnace insulation material, and high-quality silicon molybdenum rod is used as heating element. The ultra large diameter quartz furnace chamber and vacuum sealing flange system can quickly heat the sample in flowing atmosphere and vacuum. It is mainly used for calcining high-purity compounds in vacuum or inert gas, annealing or diffusion of semiconductor wafers, and can also be used for baking or sintering ceramic materials.
集控制系統與爐膛為一體
Integrated control system and furnace
高品質慘鉬鐵鉻鋁合金作為加熱元件,可加熱到1100℃
High quality Mo Fe Cr Al alloy can be heated to 1100 ℃
爐膛保溫材料采用整體真空吸附成型,節能環保
The furnace insulation material adopts the whole vacuum adsorption molding, which is energy-saving and environmental protection
大口徑的石英爐腔和真空密封法蘭系統,可以在流動氣氛和真空狀態下快速加熱樣品
The large diameter quartz furnace chamber and vacuum sealing flange system can quickly heat the sample in flowing atmosphere and vacuum
內置30段可編程精密數字溫度控制器可控制升降溫速率
The built-in 30 segment programmable precision digital temperature controller can control the temperature rise and fall rate
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電爐名稱 name |
上開門真空井式坩堝爐 Vacuum well crucible furnace with front door |
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開門方式 open |
上開門
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Working Temperature 工作溫度 |
Max. Temperature: 1200?°C ( 1 hr) 額定溫度:1200℃ (1小時) Continuous working temperature:?≤1100℃ 持續工作溫度:≤1100℃ Max.?heating Rate:?≤15°C /min 設計快升溫速率:≤40℃/分 |
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Temperature Controller 控溫方式 |
PID automatic control and?auto-tune function. 模糊PID控制和自整定調節 30 programmable segments for precise thermal processing. 智能化30段可編程控制 Built-in protection for the over-heated and broken thermocouple.? 超溫和斷偶報警功能 |
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Heating Elements 加熱元件 |
Resistance wire, Fe-Cr-Al Alloy doped by Mo 電阻絲(摻鉬鐵鉻鋁合金) |
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Temperature Accuracy 控溫精度 |
+/- 1℃ |
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Chamber size爐膛有效尺寸 |
Φ210*340mm |
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Dimensions 尺寸 |
Furnace size:?510*435*425mm(L*W*H ) 爐子尺寸:510*435*425mm(長*寬*高?) |
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Net Weight 凈重 |
70kg |
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Shipping Weight 毛重 |
100kg |
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真空法蘭 |
Special designed?flanges 定制法蘭 |
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Vacuum Pressure 真空壓力 |
133torr can be achieved by mechanical pump 機械泵可達133torr(1pa) 10^-5 torr can be reached by molecular pump 分子泵可達10^-5torr(10^-3pa) Please click the picture below to order vacuum parts 點擊下列圖片訂購真空部件
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Power 輸入電源 |
Power rated:?3KW 額定功率:3KW |
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Voltage 電壓 |
Voltage rated:??AC220V 50/60HZ 額定電壓:?AC220V 50/60HZ |
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Warranty 質保 |
Two year limited warranty with lifetime support ?(Such consumable parts as tO-rings, etc. are NOT?supported?by the warranty) 二年質保終身支持(消耗品如O型圈等不在質保范圍內) |
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Warning 注意事項 |
Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with?alumina coating. 在使用過程中爐膛表面可能出現細小裂紋。這是正常情況,裂紋可以用氧化鋁涂層修復。 |
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